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Precursors for CVD and ALD

Precursors for CVD and ALD (legacy SAFC Hitech)

Enriching Lives Through Materials Innovation
For over half a century, semiconductor technology has pushed the boundaries of possibility. From the extraordinary to the everyday, chip technology touches our lives on a daily basis, raising the efficiency of our society and greatly improving the quality of life. As the demand for performance, efficiency, reliability and connectivity grows, electronic materials have now become the driving force behind increased functional performance of semiconductor chips.

EMD Performance Materials delivers unmatched expertise in both advanced chemistry and process technology for the semiconductor industry. From molecular design to R&D to high volume scale up, our rich portfolio of high purity metal and dielectric precursor materials are powering FEOL and BEOL applications. At the heart of our business, deep collaborative relationships, along with our unique ability to develop tailored chemistries for deposition processes, are guided by an intimate understanding of customer needs.

As a problem solver and true partner throughout the entire development cycles, from R&D to commercial scale up, our integrated approach to materials development and unparalleled application and chemistry knowledge ensure that our materials and delivery systems meet impeccable quality and service standards. Backed by a global supply infrastructure with local knowledge, our passionate, flexible approach to solving problems and providing materials solutions put us ahead of the pack.

Our global presence, robust supply chain and deep collaborative relationships deliver functional performance that breaks new boundaries, enabling material innovations that enhance our everyday lives.

We provide unique chemistry service translating an in-depth understanding of silicon semiconductor performance requirements into the materials required to achieve them.

Through collaborative partnerships and an integrated approach from research and development, process development and scale up to commercial manufacturing, we invest in innovation and manufacturing, enabling current and future technology needs.

Our Precursor Development Cycle

  • Molecular Design & Proposals
  • Synthesis Development
  • Material Performance Evaluation
  • Process Development, Scale Up & Commercial Manufacture

Our Materials Roadmap

  • Performance Materials continues to develop its material program by adhering to the ITRS roadmap for logic and memory devices.

Bubblers & Containers

  • Innovation in packaging and delivery systems is one of our strengths. Our aim is to optimize product usage through a secure system.