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AZ Electronic Materials was acquired by Merck KGaA, Darmstadt, Germany, a leading company for innovative and top-quality high-tech products in the pharmaceutical, chemical and life science sectors. In the United States and Canada the subsidiaries of Merck KGaA, Darmstadt, Germany operate under the umbrella brand EMD.
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AZ Anti-reflective coatings

Anti-reflective coatings are used in the lithography process to improve the photoresist profile and reduce the line width variation caused by scattering and reflecting light.

BARCs are spin-on organic polymer formulations. These products are designed for specific lithographic wavelength processes including i-Line, 248nm, 193nm and 193nm immersion. They are coated on the wafer before the photoresist and must be performance-compatible with the photoresist.

TARCs are water soluble polymers applied as a layer above the photoresist to reduce reflection of light during exposure, resulting in improved line width control. They can also be used as a protective coating to reduce photoresist poisoning/outgassing/defects
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