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AZ Electronic Materials was acquired by Merck KGaA, Darmstadt, Germany, a leading company for innovative and top-quality high-tech products in the pharmaceutical, chemical and life science sectors. In the United States and Canada the subsidiaries of Merck KGaA, Darmstadt, Germany operate under the umbrella brand EMD.
 
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AZ Anti-collapse Rinses

EMD Performance Materials' anti-collapse rinse products provide wider process window capabilities for advanced 193nm photoresists.
By applying the anti-collapse rinse after the photoresist development and DI water rinse steps, the pattern collapse behavior is significantly improved.
Thus the photoresist film thickness can be increased to a level suitable for the substrate etch process while maintaining a manufacturable process window.
 
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