The Power of Polymers in Advanced Device Manufacturing
Polymers help enable advanced device manufacturing. From improving dielectric properties to enhancing physical properties, polymers are an important element in today's ever scaling, yet highly robust electronics devices.
Polymers and Performance
Polymers can help advanced device manufacturers improve processing speeds and overall performance cost-effectively. One such polymer is a Poly (perhydrosilazane)-(SiH2NH) based inorganic spin-on dielectric (SOD) material
, also referred to as PHPS. It's an effective polymer for integrated circuit manufactuing because of its excellent insulatingr properties and superior gap filling capabilities.
PHPS is effective, not only for its thermal properties, but also for its mechnical properties. The polymer's heat stability and excellent planarizing characteristics result in reduced topography and enable more complex layering. In fact, PHPS can be converted to SiO2, which has similar properties to high performance and more costly CVD films. Also marketed under the name AZ Spinfil®, PHPS is a polymer that's become the industry standard for FEOL gapfilling applications.
While the performance characteristics of polymers are integral to successful advanced device manufacturing, one must also consider the process as a whole. Manufacturability and cost is a significant consideration and an area where spin-on polymers can offer added benefits.
Polymers and Manufacturing
Scaling of IC devices creates many challenges to material suppliers. Applying innovative polymers such as PHPS can help to cost effectively improve scaling without comprimising device performance. The result is improved production yields and reduced manufactuing costs compared to CVD technology.
When total cost of ownership (COO) is considered, spin-on dielectric (SOD) polymers can offer significant advantages. Unlike CVD technology, PHPS does not require a hefty upfront equipment investment or ongoing equipment maintenance. This alone can significantly reduce COO while providing excellent performance to meet the device requirements.